Mechanically-Stable Micro Assembly Using Magnetic Actuation

We have developed a new magnetic actuation process for assembling three-dimensional MEMS devices using hinged, surface micromachined structures. Electroplated magnetic material (Permalloy) is integrated with two types of hinged microstructures and the magnetic actuation process has been experimentally characterized. Under a given external magnetic field, the angular displacement of a hinged structure is determined by the volume of the magnetic material or by the stiffness of an auxiliary flexural loading spring. Preliminary design rules for achieving asynchronous actuation of hinged microstructures have been established to enable effective parallel assembly of three-dimensional devices. We have demonstrated mechanically stable assembly of threedimensional devices under a globally applied external magnetic field.